Hydrophobic coating of surfaces by plasma polymerization in an RF plasma reactor with an outer planar electrode: synthesis, characterization and biocompatibility

KARAMAN, Mustafa | GÜRSOY, Mehmet | AYKÜL, Fatmanur | TOSUN, Zahide | DEMİREL KARS, Meltem | YILDIZ, Hüseyin Bekir

This paper presents the plasma polymerization of poly(hexa fl uorobutyl acrylate)(PHFBA) thin fi lms on different substrates in an RF plasma reactor with an outer planar electrode. This reactor con fi guration allows large area uniformity and fast processing times. Deposition rates of up to 60 nm min−1 were observed. The in fl uence of plasma power and substrate temperature on the deposition rate, structure and wettability of the as-deposited fi lms was investigated. It was observed that better hydrophobicity was obtained at high plasma power and in low temperature conditions. PHFBA thin fi lms depo ...Daha fazlası